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Wafer Handling

The following is a partial list of common search terms...........

Wafer handling

  • 100mm wafer

  • 150mm wafer

  • 2 axis arm

  • 200mm wafer

  • 3 axis arm

  • 300mm wafer

  • 450mm wafer

  • AlTIC wafer

  • Auto-load

  • Automation

  • Backside

  • Backside cooling

  • Backside heating

  • Baffle wafer

  • Batch

  • Batch-load

  • Bow

  • Breakage

  • Cassette

  • Cassette to cassette

  • Cassette load/unload

  • Chuck

  • Clamp

  • Clamping

  • Cluster tool

  • Contamination

  • Cooling station

  • Cycle-time

  • Dummy wafer

  • Dummy wafer

  • Edge exclusion

  • EFEM

  • Electrostatic Chuck

  • Elevator

  • End effector

  • Flat

  • FOUP

  • Frontside

  • Gripper

  • In-situ rotation

  • Load-lock

  • Manual-load

  • Misalignment

  • Notch

  • Out-gassing

  • Pitch (cassette)

  • Platten

  • Pod

  • Pre-aligner

  • Pre-clean

  • Process carrier

  • Quartz carrier

  • Quartz cassette

  • Rework

  • Robot

  • Rotation

  • Saphire

  • Scrap

  • Silicon

  • Single wafer load

  • SMIF

  • Stainless Cassette

  • Substrate

  • TC wafer

  • Test wafers

  • Thermo-couple

  • Thickness

  • Through-put

  • Vacuum chuck

  • Wafer batch

  • Wafer boat

  • Wafer bowing

  • Wafer clamping

  • Wafer tray

  • Wafers per hour (WPH)

  • Warping

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